PPT - Reactive ion etching PowerPoint Presentation, free download - ID:7059159
PPT - Reactive ion etching PowerPoint Presentation, free download - ID:7059159
Reactive ion etching. Reactive ion etching. Material selectivity. Ion Beam milling @INESC. Nordiko 3000 IBD system. 65 W RF grids: 500V, -200V 8 sccm Ar 40% rotation 70º or 40º pan. Etch rates [Å/min] @ 70ºpan. 65 W 130 W * junctions, spin valves ~ 60
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