PPT - Electron beam lithography (EBL) PowerPoint Presentation, free download - ID:6799695
PPT - Electron beam lithography (EBL) PowerPoint Presentation, free download - ID:6799695
Electron beam lithography (EBL). Overview and resolution limit. Electron source (thermionic and field emission). Electron optics (electrostatic and magnetic lens). Aberrations (spherical, chromatic, diffraction, astigmation). EBL systems (raster/vector scan, round/shaped beam)
slideserve.com已浏览 1150 次2014年11月27日
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Legacy Landing Page - Electron Beam Evaporation Systems - Angstrom Engineering
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PPT - E-beam Evaporation PowerPoint Presentation, free download - ID:3809139
PPT - E-beam Evaporation PowerPoint Presentation, free download - ID:3809139
slideserve.com
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In electron-beam lithography, a focused beam of clectrons (producod by a scanning electron microscope) is used instead of UV light to expose photoresist. Which is capable of producing smaller features: 100 eV electrons or 50 keV electrons? (In practice, the resolution of electron-beam lithography is limited by aberrations in the electron optics of the electron microscope, rather than by the wavelength of the electron - the aberration-limited resolution is about 5 nm .) | Numerade
In electron-beam lithography, a focused beam of clectrons (producod by a scanning electron microscope) is used instead of UV light to expose photoresist. Which is capable of producing smaller features: 100 eV electrons or 50 keV electrons? (In practice, the resolution of electron-beam lithography is limited by aberrations in the electron optics of the electron microscope, rather than by the wavelength of the electron - the aberration-limited resolution is about 5 nm .) | Numerade
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5 个月之前
PPT - Electron Beam Lithography PowerPoint Presentation, free download - ID:1258748
PPT - Electron Beam Lithography PowerPoint Presentation, free download - ID:1258748
slideserve.com
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PPT - Electron Beam Lithography PowerPoint Presentation, free download - ID:2132543
PPT - Electron Beam Lithography PowerPoint Presentation, free download - ID:2132543
slideserve.com
已浏览 1443 次2014年7月27日
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Scanning Electron Microscopy | Nanoscience Instruments
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