Trichlorosilane (TCS) is an inorganic compound with the formula HCl 3 Si. It is a colourless, volatile liquid. Purified trichlorosilane is the principal precursor to ultrapure silicon in the semiconductor industry. In water, it rapidly decomposes to produce a siloxane polymer while giving off hydrochloric acid.

Trichlorosilane | Cl3HSi | CID 24811 - structure, chemical names, physical and chemical properties, classification, patents, literature, biological activities, safety/hazards/toxicity information, supplier lists, and more.

Aldrich-175552; Trichlorosilane 0.99; CAS Number: 10025-78-2; Linear Formula: SiHCl3; find related products, papers, technical documents, MSDS & more at Sigma-Aldrich.

In inorganic chemistry, chlorosilanes are a group of reactive, chlorine -containing chemical compounds, related to silane (SiH4) and used in many chemical processes. Each such chemical has at least one silicon -chlorine (Si−Cl) bond. Trichlorosilane is produced on the largest scale. The parent chlorosilane is silicon tetrachloride (SiCl4). [1]

Trichlorosilane (TCS) is an inorganic compound with the formula HCl 3 Si. It is a colourless, volatile liquid. Purified trichlorosilane is the principal precursor to ultrapure silicon in the semiconductor industry. In water, it rapidly decomposes to produce a siloxane polymer while giving off hydrochloric acid.

Trichlorosilane (TCS) is considered the foundation molecule for the semiconductor industry. It is the raw material that becomes silicon for silicon wafers, which most integrated circuits are built upon.

Trichlorosilane is a chemical compound made up of silicon, hydrogen and chlorine. It is the primary raw material used by Hemlock Semiconductor (HSC) in the manufacture of polysilicon for the semiconductor and solar industries.

TRICHLOROSILANE reacts with alcohols, acetone, light metals with generation of heat and combustible (H2) and corrosive (HCl) gases [Handling Chemicals Safely 1980. p. 924].

Trichlorosilane is a chemical compound made up of silicon, hydrogen and chlorine. It is the primary raw material used by Hemlock Semiconductor Operations in the manufacture of polycrystalline silicon metal for the semiconductor and solar cell industries. It is also sold directly to semiconductor customers for use in their processes.

Quantity Value Units Method Reference Comment; Δ r H° <1510. ± 10. kJ/mol: D-EA: Pabst, Margrave, et al., 1977: gas phase; From SiCl4. G3MP2B3 calculations ...