2012年11月1日 · • Atomic Layer Deposition can deliver thin films with – Very precise thickness control (~Angstroms) – Many materials (metals, dielectrics, magnetics…) – Highly conformal – Uniform over large areas – Engineerable into “meta-materials” with alternating layers • Downside: – Slow slow slow – Not all chemistries are created equal

Atomic Layer Deposition (ALD): An Enable for Nanoscience and Nanotechnology. PowerPoint lecture presented at Harvard University, Cambridge, MA. • Elam , Jeffrey (2007).

Atomic layer deposition (ALD) is a thin film deposition technique where chemical precursors are sequentially introduced to the surface of a substrate where they chemically react directly with the surface to form sub-monolayers of film.

2012年11月1日 · Understanding Atomic Layer Deposition: Successes & Limitations and Recipe Development J Provine & Michelle Rincon November 1, 2012 Stanford University NNIN ALD Roadshow (special thanks to Ganesh Sundaram, Eric …

2014年6月1日 · Atomic layer deposition (ALD) is a vapor phase technique capable of producing thin films of a variety of materials. Based on sequential, self-limiting reactions, ALD offers exceptional conformality on high-aspect ratio structures, thickness control at the Angstrom level, and tunable film composition.

Atomic layer deposition (ALD) is a powerful technique for the fabrication of atomically precise coatings on a variety of surfaces, with subnanometer precision in both film thickness and composition.

Atomic layer deposition (ALD) is a thin-film growth technique that offers the unique capability to coat complex, three-dimensional objects with precise, conformal layers. In addition, ALD allows atomic-level control over the thickness and composition of the deposit.

Atomic layer deposition (ALD) is a novel method of thin film deposition in which the coating layer grows atom by atom and layer by layer. As a result, it is capable of achieving superior coverage and conformal deposition on an atomic scale.

ALD; Atomic layer chemical vapor deposition; Atomic layer CVD (AL-CVD); Atomic layer epitaxy (ALE); Molecular layer deposition (MLD) Definition Atomic layer deposition is a method of thin film growth related to chemical vapor deposition whereby two or more vapor phase precursor chemicals are individually and sequentially introduced to a ...

Since the first edition was published in 2008, Atomic Layer Deposition (ALD) has emerged as a powerful, and sometimes preferred, deposition technology. The new edition of this groundbreaking monograph is the first text to review the subject of ALD comprehensively from a practical perspective.