Let us help you with your inquiries, brochures and pricing requirements Request A Quote Download PDF Copy Download Brochure The Orion III Plasma Enhanced Chemical ...
To deposit the AlOx layer it utilized an industrial batch-type LF-PECVD system provided by German PV equipment manufacturer Centrotherm, whose researchers also contributed to the research.
For the first time globally, a 4-inch heterostructure fabrication technology using plasma-enhanced chemical vapor deposition (PECVD) has been developed. This breakthrough enables the production of ...
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