Guangxi Key Laboratory of Processing for Non-ferrous Metals and Featured Materials, MOE Key Laboratory of New Processing Technology for Nonferrous Metals and Materials, School of Resources, ...

Creative Commons (CC): This is a Creative Commons license. Attribution (BY): Credit must be given to the creator. Confocal Raman microscopy, a highly specific and label-free technique for the ...

In this work, a fabrication process of thin-film encapsulation (TFE) with aluminum nitride (AlN)/molybdenum (Mo) cap is proposed for the packaging of film bulk acoustic wave resonators and filters.