5I500D 具有优良的等离子体特性，例如高密度，低离子能量，沉积介质膜时低压强等。平板ICP等离子源 SENTECH专有的平板三螺旋天线(PTSA)等离子源能实现高效低功率耦合。 优良的沉积效果 沉积的薄膜具有损伤少、击穿电压高、应力低，对衬底无损伤，极低表面态 ...

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