Abstract: Plasma-assisted deposition of thin films is widely used in microelectronic circuit manufacturing. Materials deposited include conductors such as tungsten, copper, aluminum, transition-metal ...

Until 2018, DRAM peripheral transistors were predominantly made in planar logic MOSFET technology with poly-Si/SiO 2 or ...

Steven Girard received one of three 2024 Universities of Wisconsin Innovation Grants for his proposal “’Sea-Change’ Silicides: Superalloy and Biomedical Coatings from Sustainable and ...

Creative Commons (CC): This is a Creative Commons license. Attribution (BY): Credit must be given to the creator. Surface-enhanced infrared absorption (SEIRA) spectroscopy under highly controlled ...

Steven Girard an associate professor of chemistry was announced as one of three recipients of the 2024 Universities of Wisconsin Innovation Grant for his proposal "Sea-Change' Silicides ...