To improve data storage, researchers are perfecting 3D NAND flash memory, which stacks cells to maximize space. Researchers ...
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Plasma technique doubles etch rate for 3D NAND flash memoryTo store ever more data in electronic devices of the same size, the manufacturing processes for these devices need to be ...
The narrow, deep holes required for one type of flash memory are made twice as fast with the right recipe, which includes a ...
An artist’s representation of a hole etched into ... the very small but deep, circular holes needed for microelectronics, he said. However, the process, known as reactive ion etching, isn ...
To store ever more data in electronic devices of the same size, the manufacturing processes for these devices need to be studied in greater detail. By ...
Persistent Link: https://ieeexplore.ieee.org/servlet/opac?punumber=5288520 ...
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