structures or deep cavities needed for certain types of MEMS devices. Scanning electron microscope (SEM) images of products from each type of micromachining process (Source: BioPOETS Lab, Berkeley).

MEMS just took the wraps off of its new Lassen speaker. This is the first MEMS speaker that doesn't need an amplifier.

What Drives Us in Mechanical Engineering? Mechanical engineers use the principles of energy, materials, and mechanics to design and manufacture machines and devices of all types. At Drexel, our ...

Electrostatic motors are now common in MEMS applications ... type motors largely supplanted the technology due to the types of materials available to engineers of the time. Newer dielectric ...