MEMS (Micro-Electro-Mechanical Systems, MEMS) probe card with the optimized structure and is an ideal to support fine-pitch and high-pin count test requirements. The Virgo Prima MEMS micro-cantilever ...
The launch of STAr Virgo Prima, which is one of probe card series for semiconductor parametric and reliability test, presents the achievement in 3D/2.5D MEMS probe card development for WAT test (Wafer ...
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