With an installation base of over 1,500 systems worldwide, Heidelberg Instruments is a world leader in the design, development and manufacture of high-precision laser lithography systems, maskless ...

Extreme ultraviolet (EUV) lithography is the next step in this trend. It uses radiation of wavelength 13.5 nm, thereby offering significant potential to extend the resolution of photolithography ...

Their lithography systems are primarily used within research institutions. In February 2018 Heidelberg Instruments acquired 70% of the outstanding shares of SwissLitho for an undisclosed amount with ...