At each location where the electron beam strikes the sample, an electron signal is used to produce contrast ... Commonly used vacuum systems consist of an oil filled roughing pump to produce a vacuum ...
In e-beam lithography, or EBL, shapes are drawn onto a wafer using an electron beam in a vacuum chamber. This is a slow process compared to optical lithography, as used in mass production ...
A beam of electrons is produced at the top of the microscope by an electron gun. The electron beam follows a vertical path through the microscope, which is held within a vacuum. The beam travels ...
More information: C. Emma et al, Experimental Generation of Extreme Electron Beams for Advanced Accelerator Applications, ...
Scientists have taken a giant leap forward in particle physics by creating an electron beam with five times more peak current ...