An image of the 4.7-μm 4-inch wafer with arrow indicating the TSRR structure. Underneath a white light, the letters “SJTU SYSU” printed on a piece of paper below the thin silicon wafer are ...

Using PECVD equipment, the research team succeeded in producing two types of 4-inch wafer-scale heterostructures. The first type, a heterostructure of WS 2) and graphene, was fabricated by ...