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金刚石半导体衬底研磨抛光技术研究现状及展望(一)
Lu等用Coborn PL5行星研磨机用陶瓷结合剂金刚石砂轮对 PCD 进行磨削 ... Zheng[12]采用高速三维动态摩擦抛光(high -speed three - dimensional dynamic fric⁃tion polishing,3DM-DFP)对 SCD 和 PCD 机械抛光产生的机械损伤进行了研究,发现随着转速的增加,亚表面缺陷开始形成并 ...
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